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Details for article 11 of 51 found articles
| Title: |
Characteristics of films deposited by the irradiation of GeCHx + ions produced from hexamethyldigermane and their dependence on the injected ion energy |
| Author: |
Yoshimura, Satoru Sugimoto, Satoshi Takeuchi, Takae Murai, Kensuke Kiuchi, Masato |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 461 () nr. C pages 1-5 |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 51 found articles
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