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  The sputtering yield of crystalline Si(1 0 0) surface by monoatomic and diatomic nitrogen ions impact
 
 
Title: The sputtering yield of crystalline Si(1 0 0) surface by monoatomic and diatomic nitrogen ions impact
Author: Hoshino, Y.
Yachida, G.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 460 () nr. C pages 155-160
Year: 2019
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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