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Journal description
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Details for article 86 of 92 found articles
| Title: |
Thermal stability and diffusion studies in the Au and Bi implanted AZ1350 photoresist |
| Author: |
Behar, M. Amaral, L. Zawislak, F.C. Guimarães, R.B. Fink, D. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 46 (1990) nr. 1-4 pages 4 p. |
| Year: |
1990 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 86 of 92 found articles
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