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Molecular dynamics simulation of helium ion implantation into silicon and its migration |
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Titel: |
Molecular dynamics simulation of helium ion implantation into silicon and its migration |
Auteur: |
Liu, Lei Xu, Zongwei Li, Rongrong Zhu, Rui Xu, Jun Zhao, Junlei Wang, Chao Nordlund, Kai Fu, Xiu Fang, Fengzhou |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 456 (2019) nr. C pagina's 53-59 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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