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Analysis of defect structure in GaN epilayers doped with implanted Si+ by RBS/c method |
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Title: |
Analysis of defect structure in GaN epilayers doped with implanted Si+ by RBS/c method |
Author: |
Pągowska, K.D. Kozubal, M. Taube, A. Trajnerowicz, A. Kruszka, R. Gołaszewska-Malec, K. Dynowska, E. Jakieła, R. Barcz, A. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 450 () nr. C pages 248-251 |
Year: |
2019 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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