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A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS |
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Titel: |
A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS |
Auteur: |
Baumann, S.M. Martner, C.C. Martin, D.W. Blattner, R.J. Braundmeier Jr., A.J. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 45 (1990) nr. 1-4 pagina's 5 p. |
Jaar: |
1990 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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