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A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS |
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Title: |
A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS |
Author: |
Baumann, S.M. Martner, C.C. Martin, D.W. Blattner, R.J. Braundmeier Jr., A.J. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 45 (1990) nr. 1-4 pages 5 p. |
Year: |
1990 |
Contents: |
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Publisher: |
Published by Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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