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Effects of ion irradiation on chemical and mechanical properties of magnetron sputtered amorphous SiOC |
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Titel: |
Effects of ion irradiation on chemical and mechanical properties of magnetron sputtered amorphous SiOC |
Auteur: |
Zare, A. Su, Q. Gigax, J. Shojaee, S.A. Harriman, T.A. Nastasi, M. Shao, L. Materer, N.F. Lucca, D.A. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 446 (2019) nr. C pagina's 10-14 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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