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Size effect in AlN/SiN multilayered films irradiated with helium and argon ions |
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Titel: |
Size effect in AlN/SiN multilayered films irradiated with helium and argon ions |
Auteur: |
Uglov, V.V. Kvasov, N.T. Remnev, G.E. Shymanski, V.I. Korenevski, E.L. Zlotski, S.V. Abadias, G. O'Connel, J. van Vuuren, A. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 435 (2018) nr. C pagina's 228-235 |
Jaar: |
2018 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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