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  Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions
 
 
Title: Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions
Author: Yang, Yitao
Zhang, Chonghong
Su, Changhao
Ding, Zhaonan
Song, Yin
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 422 (2018) nr. C pages 50-53
Year: 2018
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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