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Journal description
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Details for article 62 of 75 found articles
| Title: |
Spectroscopy of highly charged ions for extreme ultraviolet lithography |
| Author: |
O'Sullivan, Gerry Dunne, Padraig Higashiguchi, Takeshi Kos, Domagoj Maguire, OisÃn Miyazaki, Takanori O'Reilly, Fergal Sheil, John Sokell, Emma Kilbane, Deirdre |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 408 (2017) nr. C pages 3-8 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 62 of 75 found articles
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