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Defect formation in MeV H+ implanted GaN and 4H-SiC investigated by cross-sectional Raman spectroscopy |
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Titel: |
Defect formation in MeV H+ implanted GaN and 4H-SiC investigated by cross-sectional Raman spectroscopy |
Auteur: |
Huang, Kai Jia, Qi You, Tiangui Zhang, Shibin Lin, Jiajie Zhang, Runchun Zhou, Min Yu, Wenjie Zhang, Bo Ou, Xin Wang, Xi |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 406 (2017) nr. PB pagina's 656-661 |
Jaar: |
2017 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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