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Details for article 56 of 60 found articles
| Title: |
The parameter influence of ion irradiation on the distribution profile of the defect in silicon films |
| Author: |
Shemukhin, A.A. Balaskshin, Yu.V. Evseev, A.P. Chernysh, V.S. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 406 (2017) nr. PB pages 507-510 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 56 of 60 found articles
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