Fabrication of monolithic microfluidic channels in diamond with ion beam lithography
Titel:
Fabrication of monolithic microfluidic channels in diamond with ion beam lithography
Auteur:
Picollo, F. Battiato, A. Boarino, L. Ditalia Tchernij, S. Enrico, E. Forneris, J. Gilardino, A. Jakšić, M. Sardi, F. Skukan, N. Tengattini, A. Olivero, P. Re, A. Vittone, E.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms