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Journal description
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Details for article 9 of 178 found articles
| Title: |
A noncharging direct-write electron beam process for a trilayer resist by ion shower technology |
| Author: |
Hashimoto, Kazuhiko Koizumi, Taichi Sakashita, Toshihiko Kawakita, Kenji Nomura, Noboru |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 39 (1989) nr. 1-4 pages 4 p. |
| Year: |
1989 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 178 found articles
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