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Nonlinear phenomena in hydrogen implantation into (100) silicon |
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Title: |
Nonlinear phenomena in hydrogen implantation into (100) silicon |
Author: |
Cerofolini, G.F. Meda, L. Volpones, C. Dierckx, R. Mercurio, G. Anderle, M. Canteri, R. Cembali, F. Fabbri, R. Servidori, M. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 39 (1989) nr. 1-4 pages 4 p. |
Year: |
1989 |
Contents: |
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Publisher: |
Published by Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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