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Characterization of hydrogenated and deuterated silicon carbide films codeposited by magnetron sputtering |
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Titel: |
Characterization of hydrogenated and deuterated silicon carbide films codeposited by magnetron sputtering |
Auteur: |
Pantelica, D. Ionescu, P. Petrascu, H. Dracea, M.D. Statescu, M. Matei, E. Rasoga, O. Stancu, C. Marascu, V. Ion, V. Acsente, T. Dinescu, G. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 371 () nr. C pagina's 322-326 |
Jaar: |
2016 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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