Round Robin computer simulation of ejection probability in sputtering
Titel:
Round Robin computer simulation of ejection probability in sputtering
Auteur:
Sigmund, P. Robinson, M.T. Baskes, M.I. Hautala, M. Cui, F.Z. Eckstein, W. Yamamura, Y. Hosaka, S. Ishitani, T. Shulga, V.I. Harrison Jr., D.E. Chakarov, I.R. Karpuzo, D.S. Kawatoh, E. Shimizu, R. Valkealahti, S. Nieminen, R.M. Betz, G. Husinsky, W. Shapiro, M.H. Vicanek, M. Urbassek, H.M.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms