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                                       Details for article 29 of 44 found articles
 
 
  Lifetime dependence of nitrided carbon stripper foils on sputter angle during N+ ion beam sputtering
 
 
Title: Lifetime dependence of nitrided carbon stripper foils on sputter angle during N+ ion beam sputtering
Author: Sugai, I.
Oyaizu, M.
Takeda, Y.
Kawakami, H.
Kawasaki, K.
Hattori, T.
Kadono, T.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 358 (2015) nr. C pages 8 p.
Year: 2015
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 29 of 44 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands