Scanning electron microscopy of the surfaces of ion implanted SiC
Titel:
Scanning electron microscopy of the surfaces of ion implanted SiC
Auteur:
Malherbe, Johan B. van der Berg, N.G. Kuhudzai, R.J. Hlatshwayo, T.T. Thabethe, T.T. Odutemowo, O.S. Theron, C.C. Friedland, E. Botha, A.J. Wendler, E.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms