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Journal description
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Details for article 8 of 64 found articles
| Title: |
Automatic beam focusing in the 2nd generation PBW line at sub-10nm line resolution |
| Author: |
Yao, Y. van Kan, J.A. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 348 (2015) nr. C pages 6 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 64 found articles
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