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Journal description
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Details for article 10 of 17 found articles
| Title: |
Maskless nano-implant of 20keV Ga+ in bulk Si(100) substrates |
| Author: |
Milazzo, R.G. D’Arrigo, G. Mio, A.M. Rimini, E. Spinella, C. Peto, L. Nadzeyka, A. Bauerdick, S. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 341 (2014) nr. C pages 6 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 17 found articles
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