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Neutron-enhanced annealing of ion-implantation induced damage in silicon heated by nuclear reactions |
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Titel: |
Neutron-enhanced annealing of ion-implantation induced damage in silicon heated by nuclear reactions |
Auteur: |
Kinomura, A. Yoshiie, T. Chayahara, A. Mokuno, Y. Tsubouchi, N. Horino, Y. Xu, Q. Sato, K. Yasuda, K. Ishigami, R. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 334 (2014) nr. C pagina's 4 p. |
Jaar: |
2014 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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