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                                       Details for article 38 of 102 found articles
 
 
  Experimental and modeling study on increasing accuracy of strain measurement by ion beam analysis in SiGe strained layer thin films
 
 
Title: Experimental and modeling study on increasing accuracy of strain measurement by ion beam analysis in SiGe strained layer thin films
Author: Martin, Michael S.
Wijesundera, Dharshana
Thompson, Phillip E.
Wang, Xuemei
Chu, Wei-Kan
Shao, Lin
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 332 (2014) nr. C pages 4 p.
Year: 2014
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 38 of 102 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands