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Journal description
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Details for article 28 of 36 found articles
| Title: |
Systematic investigations of low energy Ar ion beam sputtering of Si and Ag |
| Author: |
Feder, R. Frost, F. Neumann, H. Bundesmann, C. Rauschenbach, B. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 317 (2013) nr. PA pages 6 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 36 found articles
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