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Journal description
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Details for article 71 of 83 found articles
| Title: |
Surface damage of 6H–SiC originating from argon plasma irradiation |
| Author: |
Kawakami, Retsuo Niibe, Masahito Takeuchi, Hideo Konishi, Masashi Mori, Yuta Shirahama, Tatsuo Yamada, Tetsuya Tominaga, Kikuo |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 315 (2013) nr. C pages 5 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 71 of 83 found articles
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