|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 3 of 51 found articles
| Title: |
Analysis of depth redistribution of implanted Fe near SiO2/Si interface |
| Author: |
Hoshino, Y. Yokoyama, A. Yachida, G. Nakata, J. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 314 (2013) nr. C pages 4 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 51 found articles
| << previous | next >> |