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Journal description
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Details for article 17 of 72 found articles
| Title: |
Development of procedures for programmable proximity aperture lithography |
| Author: |
Whitlow, H.J. Gorelick, S. Puttaraksa, N. Napari, M. Hokkanen, M.J. Norarat, R. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 306 (2013) nr. C pages 4 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 72 found articles
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