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Journal description
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Details for article 10 of 14 found articles
| Title: |
Residual stress analysis of TiN film fabricated by plasma immersion ion implantation and deposition process |
| Author: |
Liu, Hongxi Xu, Qian Zhang, Xiaowei Wang, Chuanqi Tang, Baoyin |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 297 (2013) nr. C pages 6 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 14 found articles
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