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Journal description
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Details for article 10 of 22 found articles
| Title: |
Local strain induced in silicon by Si3N4 lines: Modeling and experimental investigation via X-ray diffraction |
| Author: |
Ezzaidi, Y. Gaudeau, G. Escoubas, S. Thomas, O. Morin, P. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 284 (2012) nr. C pages 6 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 22 found articles
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