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  Creation of Si nanocrystals from SiO2/Si by He and H ion implantation
 
 
Title: Creation of Si nanocrystals from SiO2/Si by He and H ion implantation
Author: Zhang, X.D.
Liu, C.L.
Li, M.K.
Gao, Y.J.
Zhang, D.C.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 276 (2012) nr. C pages 5 p.
Year: 2012
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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