Materials modifications using a multi-ion beam processing and lithography system
Titel:
Materials modifications using a multi-ion beam processing and lithography system
Auteur:
Appleton, Bill R. Tongay, S. Lemaitre, M. Gila, Brent Fridmann, Joel Mazarov, Paul Sanabia, Jason E. Bauerdick, S. Bruchhaus, Lars Mimura, Ryo Jede, Ralf
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms