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Details for article 68 of 113 found articles
| Title: |
3–10keV Xe+ ion beam machining of ultra low thermal expansion glasses for EUVL projection optics: Evaluation of surface roughness |
| Author: |
Morikawa, K. Kamijo, K. Morijiri, K. Pahlovy, S.A. Aikawa, N. Miyamoto, I. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 272 (2012) nr. C pages 5 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 68 of 113 found articles
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