Implantation energy effect on photoluminescence spectroscopy of Si nanocrystals locally fabricated by stencil-masked ultra-low-energy ion-beam-synthesis in silica
Titel:
Implantation energy effect on photoluminescence spectroscopy of Si nanocrystals locally fabricated by stencil-masked ultra-low-energy ion-beam-synthesis in silica
Auteur:
Diaz, R. Suarez, C. Arbouet, A. Marty, R. Paillard, V. Gloux, F. Bonafos, C. Schamm-Chardon, S. Grisolia, J. Normand, P. Dimitrakis, P. BenAssayag, G.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms