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Journal description
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Details for article 23 of 25 found articles
| Title: |
The role of energetic ion bombardment in silicon-fluorine chemistry |
| Author: |
Coburn, J.W. Winters, H.F. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 27 (1987) nr. 1 pages 6 p. |
| Year: |
1987 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 25 found articles
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