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Journal description
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Details for article 21 of 34 found articles
| Title: |
Quantitative characterization of xenon bubbles in silicon: Correlation of bubble size with the damage generated during implantation |
| Author: |
Wittmaack, Klaus Oppolzer, Helmut |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 269 (2011) nr. 3 pages 6 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 34 found articles
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