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Structural and electrical characterizations of n-type implanted layers and ohmic contacts on 3C-SiC |
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Title: |
Structural and electrical characterizations of n-type implanted layers and ohmic contacts on 3C-SiC |
Author: |
Song, X. Biscarrat, J. Michaud, J.-F. Cayrel, F. Zielinski, M. Chassagne, T. Portail, M. Collard, E. Alquier, D. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 269 (2011) nr. 18 pages 6 p. |
Year: |
2011 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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