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Structural and electrical characterizations of n-type implanted layers and ohmic contacts on 3C-SiC |
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Titel: |
Structural and electrical characterizations of n-type implanted layers and ohmic contacts on 3C-SiC |
Auteur: |
Song, X. Biscarrat, J. Michaud, J.-F. Cayrel, F. Zielinski, M. Chassagne, T. Portail, M. Collard, E. Alquier, D. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 269 (2011) nr. 18 pagina's 6 p. |
Jaar: |
2011 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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