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Investigation of hydrogen concentration and hardness of ion irradiated organically modified silicate thin films |
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Titel: |
Investigation of hydrogen concentration and hardness of ion irradiated organically modified silicate thin films |
Auteur: |
Qi, Y. Prenzel, T. Harriman, T.A. Wang, Y.Q. Lucca, D.A. Williams, D. Nastasi, M. Dong, J. Mehner, A. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 268 (2010) nr. 11-12 pagina's 4 p. |
Jaar: |
2010 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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