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Surface exfoliation and defect structures in Si induced by 160keV He and 110keV H ion implantation |
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Titel: |
Surface exfoliation and defect structures in Si induced by 160keV He and 110keV H ion implantation |
Auteur: |
Wang, Zhuo Liu, Changlong Liu, Tianyu Zhang, Xiaodong Li, Wenrun Li, Wenxia Yuan, Bing Wu, Pei Li, Mengkai |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 266 (2008) nr. 2 pagina's 6 p. |
Jaar: |
2008 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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