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                                       Details for article 11 of 27 found articles
 
 
  High energy Au-implantation into silicon: Radiation damage and microscopical distribution of implanted atoms
 
 
Title: High energy Au-implantation into silicon: Radiation damage and microscopical distribution of implanted atoms
Author: Lindner, J.K.N.
Hecking, N.
Te Kaat, E.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 26 (1987) nr. 4 pages 6 p.
Year: 1987
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 11 of 27 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands