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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 21 of 188 found articles
| Title: |
Cluster ion beam process technology – 20 years of R&D history |
| Author: |
Yamada, Isao |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 257 (2007) nr. 1-2 pages 7 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 188 found articles
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