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Journal description
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Details for article 26 of 35 found articles
| Title: |
Molecular dynamic simulation on boron cluster implantation for shallow junction formation |
| Author: |
Yuan, Li Yu, Min Li, Wei Ji, Huihui Ren, Liming Zhan, Kai Huang, Ru Zhang, Xing Wang, Yangyuan Zhang, Jinyu Oka, Hideki |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 251 (2006) nr. 2 pages 5 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 35 found articles
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