A nuclear reaction analysis and optical microscopy study on controlled growth of large SiC nanocrystals on Si formed by low-energy ion implantation and electron beam annealing
Titel:
A nuclear reaction analysis and optical microscopy study on controlled growth of large SiC nanocrystals on Si formed by low-energy ion implantation and electron beam annealing
Auteur:
Markwitz, A. Lucas, F. Rusterucci, J. Kennedy, J. Trompetter, W.J. Rudolphi, M. Ryan, M. White, V. Johnson, S.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms