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Analysis of the accuracy of several methods for determining the concentration of 11B+ implanted silicon |
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Titel: |
Analysis of the accuracy of several methods for determining the concentration of 11B+ implanted silicon |
Auteur: |
Duggan, J.L. Naab, F. Hossain, K. Holland, O.W. McDaniel, F.D. Xu, J.J. Zhao, Z.Y. Guo, B.N. Liu, J. Shim, K.H. Jeong, U. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 243 (2006) nr. 1 pagina's 6 p. |
Jaar: |
2006 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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