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A new apparatus for deep patterning of beam sensitive targets by means of high-energy ion beam |
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Titel: |
A new apparatus for deep patterning of beam sensitive targets by means of high-energy ion beam |
Auteur: |
Rovelli, A. Amato, A. Botta, D. Chiodoni, A. Gerbaldo, R. Ghigo, G. Gozzelino, L. Laviano, F. Minetti, B. Mezzetti, E. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 240 (2005) nr. 4 pagina's 8 p. |
Jaar: |
2005 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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