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Details for article 88 of 92 found articles
| Title: |
Ultra-shallow junction formation by B18H22 ion implantation |
| Author: |
Kawasaki, Y. Kuroi, T. Yamashita, T. Horita, K. Hayashi, T. Ishibashi, M. Togawa, M. Ohno, Y. Yoneda, M. Horsky, Tom Jacobson, Dale Krull, Wade |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 237 (2005) nr. 1-2 pages 5 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 88 of 92 found articles
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