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                                       Details for article 37 of 92 found articles
 
 
  Formation of almost delta-layered nanoparticles in SiO2 thin film on Si substrate by metal negative-ion implantation
 
 
Title: Formation of almost delta-layered nanoparticles in SiO2 thin film on Si substrate by metal negative-ion implantation
Author: Ishikawa, Junzo
Tsuji, Hiroshi
Arai, Nobutoshi
Matsumoto, Takuya
Ueno, Kazuya
Adachi, Kouichiro
Kotaki, Hiroshi
Gotoh, Yasuhito
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 237 (2005) nr. 1-2 pages 6 p.
Year: 2005
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 37 of 92 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands