|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 35 of 92 found articles
| Title: |
Enhancement of c-axis texture of AlN films by substrate implantation |
| Author: |
Chen, C.H. Yeh, J.M. Hwang, J. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 237 (2005) nr. 1-2 pages 6 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 35 of 92 found articles
| << previous | next >> |