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Journal description
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Details for article 31 of 92 found articles
| Title: |
Electrical activation of solid-phase epitaxially regrown ultra-low energy boron implants in Ge preamorphised silicon and SOI |
| Author: |
Hamilton, J.J. Collart, E.J.H. Colombeau, B. Jeynes, C. Bersani, M. Giubertoni, D. Sharp, J.A. Cowern, N.E.B. Kirkby, K.J. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 237 (2005) nr. 1-2 pages 6 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 92 found articles
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