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                                       Details for article 12 of 92 found articles
 
 
  Characterization of copper metallization for interconnect by 90°-bend electromagnetic filtered vacuum arc
 
 
Title: Characterization of copper metallization for interconnect by 90°-bend electromagnetic filtered vacuum arc
Author: Chen, Uei-Shin
Shih, Han C.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 237 (2005) nr. 1-2 pages 7 p.
Year: 2005
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 12 of 92 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands